Sensaras 超声波液位计 适用于半导体ALD/CVD/PVD等设备容器液位检测 FC-PLS960系列

杭州富昌科技有限公司是美国Sensaras的中国区唯一代理，面向半导体客户提供品牌全系列超声波液位计等，提供产品技术方案选型、培训等服务。

The Ultrasonic Point Level System 960 Series is designed to detect the level of Ultra-Pure Liquid Chemical in Bubblers and Ampoules in the Semiconductor industry in PVD, CVD and ALD processes. The probe fits in the ½” or ¾” VCR fill port of the ampoules. There are no moving parts to the probe that may introduce impurities. It is not dependent on the color, dielectric, density and viscosity of the chemical. The design allows for multiple sensing points. All wetted parts of the probe is 316LSS, electro-polish finish and leak tested. 

• The sensors can be made to any length.
• The sensor can be fitted with a K-Type thermocouple sensor. 
• The set points can be places as close as 0.1” (2.5mm) apart.
• Up to 7 point on 3/4VCR, and up to 5 point on ½” VCR.
• Up to 120°C standard, up to 180°C special Hi-Temp. 
• The electronics output has a LED and a 1A SPDT relay for each point.
• In addition, it has a 1A SPDT Fault Function relay. 
• An option of electronics with fail-safe relay contacts. 
• An option of electronics with fail-safe with a Watch-Dog-Timer-Circuit. 
• An option of electronics with standard and fail-safe and TC display.

[  其他要求  ]

• 超声波液位计为定制型号，具体参数包括长度、材质、压力、图纸等请与网站管理员联系

[  声明  ]

• 具体参数会根据产品的升级做相应的调整，如有更改不另做通知，参数请以实物沟通为准